We have investigated the preparation of beta-FeSi2 substrate and growth condition of beta-FeSi2 thin film on beta-FeSi2 (110) substrate by molecular beam epitaxy. The surface of the substrate was prepared by a wet-etching using HF(50%):HNO3(60%):H2O = 1:1:5 solution at 25 degrees C. It is clear that the optimal etching period to obtain a flat surface was 3 min. The beta-FeSi2 thin film with streak RHEED pattern was obtained at Si/Fe flux ratio of 2.9. Average surface roughness (Ra) of the beta-FeSi2 film was about 0.5 nm in 5 x 5 mu m(2) area. (c) 2007 Elsevier B.V. All rights reserved.