Nanostructured cathode thin films with vertically-aligned nanopores (VANP) were processed using a pulsed laser deposition technique (PLD). These VANP structures enhance the oxygen-gas phase diffusivity, thus improve the overall thin film SOFC performance. La0.5Sr0.5CoO3 (LSCO) and La0.4Sr0.6Co0.8Fe0.2O3 (LSCFO) were deposited on various substrates (YSZ, Si and pressed Ce0.9Gd0.1O1.95 disks). Microstructures and properties of the nanostructured cathodes were characterized by TEM, HRTEM, SEM and electrochemical measurements. Additionally these well-aligned VANP structures relieve or partially relieve the internal thermal stress and lattice strain caused by the differences of thermal expansion coefficients and lattice mismatch between the electrode and the electrolyte. (C) 2007 Elsevier B.V. All rights reserved.