Characterization and fabrication of polyvinylsilazane glass microfluidic channels via soft lithographic technique

Hong-Joo Lee; Tae-Ho Yoon; Jun-Hong Park; Jayakumar Perumal; Dong-Pyo Kim

Journal of Industrial and Engineering Chemistry, Vol.14, No.1, 45-51, January, 2008

DOI10.1016/j.jiec.2007.06.002 Export Citation

Characterization and fabrication of polyvinylsilazane glass microfluidic channels via soft lithographic technique

Hong-Joo Lee, Tae-Ho Yoon, Jun-Hong Park, Jayakumar Perumal, and Dong-Pyo Kim^†

School of Applied Chemistry and Biological Engineering, Chungnam National University, 220 Gung-dong, Yuseong-gu, Daejeon 305-764, Korea

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The microfabrication of ceramic materials with thermal, chemical, and tribological stability has created inevitable demands for devices in the fields of micro total analysis systems ( mu-TAS) and MEMS (Microelectromechanical systems). This study reports the preparation of nano-sized patterns and microfluidic channels using a soft lithographic technique, followed by the UV and thermal curation of SiCN preceramic polymer, polyvinylsilazane. The thermal characterization of the polyvinylsilazane revealed the cured polymer to have ceramic properties at higher temperature than 600℃. It is believed that the fabrication of microchannels using cured inorganic polymers has enormous potential in the field of microfluidics, where materials with high optical transparency, thermal stability and chemical inertness are in demand. (c) 2007 The Korean Society of Industrial and Engineering Chemistry. Published by Elsevier B.V. All rights reserved.

Keywords:polyvinylsilazane;soft lithography;microfluidics;imprint lithography;preceramic polymer

[References]

Nghiem QD, Kim DP, J. Ind. Eng. Chem., 12, 1347 (2006)
Hong LY, Kim DJ, Kim DP, J. Ind. Eng. Chem., 10(6), 936 (2004)
Jeon JK, Uchimaru Y, Kim DP, Inorg. Chem., 43(16), 4796 (2004)
Song H, Ismagilov RF, J. Am. Chem. Soc., 125(47), 14613 (2003)
Xia YN, Rogers JA, Paul KE, Whitesides GM, Chem. Rev., 99(7), 1823 (1999)
Nguyen NT, Wereley ST, Fundamentals and Applications of Microfluidics, Artech House, Boston (2002)
Yoon TH, Lee HJ, Jia Y, Kim DP, J. Ceram. Soc. Jpn., 114, 473 (2006)
Sung IK, Christian, Mitchell M, Kim DP, Kenis PJA, Adv. Funct. Mater., 15(8), 1336 (2005)
Mehregany M, Zorman CA, Rajan N, Wu CH, Proc. IEEE, 86, 1594 (1998)
Schubert U, Hsing N, Synthesis of Inorganic Materials, Synthesis of Inorganic Materials (2000)
Shah SR, Raj R, J. Euro. Ceram. Soc., 25, 243 (2005)
Liew LA, Bright VM, Raj R, Sens. Actuators A-Phys., 104, 246 (2003)
Liew LA, Zhang W, Bright VM, An L, Dunn ML, Raj R, Sens. Actuators A-Phys., 89, 64 (2001)
Liew LA, Liu Y, Luo R, Cross T, An L, Bright VM, Dunn ML, Daily JW, Rai R, Sens. Actuators A-Phys., 95, 120 (2002)
Becker H, Lacascio LE, Talanta, 56, 267 (2002)
Xia Y, Whitesides GM, Annu. Rev. Mater. Sci., 28, 153 (1998)
Hanemann T, Ade M, Borner M, Motz G, Schulz M, Hauelt J, Adv. Eng. Mater., 4, 869 (2002)
Cromme P, Scheffler M, Greil P, Adv. Eng. Mater., 4, 873 (2002)
Chou SY, Krauss PR, Renstrom PJ, Appl. Phys. Lett., 67, 3114 (1995)
Chou SY, Krauss PR, Renstrom PJ, J. Vac. Sci. Technol. B, 14(6), 4129 (1996)
Ooe H, Morimatsu M, Yoshikawa Y, Kawata H, Hirai Y, J. Vac. Sci. Technol. B, 23(2), 375 (2005)
Hirai Y, Harada S, Kikuta H, Tanaka Y, Okano M, Isaka S, Kobayasi M, J. Vac. Sci. Technol. B, 20(6), 2867 (2002)
Lee JN, Park C, Whitesides GM, Anal. Chem., 75, 6544 (2003)
Bhushan B, Li X, Int. Mater. Rev., 48, 125 (2003)
Li XD, Bhushan B, Thin Solid Films, 340(1-2), 210 (1999)
Lim X, Bhushan B, Takashima K, Baek CW, Kim YK, Ultramicroscopy, 97, 481 (2003)
Dittrich PS, Tachikawa K, Manz A, Anal. Chem., 78, 3887 (2006)
Asthana A, Asthana Y, Sung IK, Kim DP, Lab Chip, 9, 1200 (2006)

[Referenced By]

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[1] Nghiem QD, Kim DP, J. Ind. Eng. Chem., 12, 1347 (2006)

[2] Hong LY, Kim DJ, Kim DP, J. Ind. Eng. Chem., 10(6), 936 (2004)

[3] Jeon JK, Uchimaru Y, Kim DP, Inorg. Chem., 43(16), 4796 (2004)

[4] Song H, Ismagilov RF, J. Am. Chem. Soc., 125(47), 14613 (2003)

[5] Xia YN, Rogers JA, Paul KE, Whitesides GM, Chem. Rev., 99(7), 1823 (1999)

[6] Nguyen NT, Wereley ST, Fundamentals and Applications of Microfluidics, Artech House, Boston (2002)

[7] Yoon TH, Lee HJ, Jia Y, Kim DP, J. Ceram. Soc. Jpn., 114, 473 (2006)

[8] Sung IK, Christian, Mitchell M, Kim DP, Kenis PJA, Adv. Funct. Mater., 15(8), 1336 (2005)

[9] Mehregany M, Zorman CA, Rajan N, Wu CH, Proc. IEEE, 86, 1594 (1998)

[10] Schubert U, Hsing N, Synthesis of Inorganic Materials, Synthesis of Inorganic Materials (2000)

[11] Shah SR, Raj R, J. Euro. Ceram. Soc., 25, 243 (2005)

[12] Liew LA, Bright VM, Raj R, Sens. Actuators A-Phys., 104, 246 (2003)

[13] Liew LA, Zhang W, Bright VM, An L, Dunn ML, Raj R, Sens. Actuators A-Phys., 89, 64 (2001)

[14] Liew LA, Liu Y, Luo R, Cross T, An L, Bright VM, Dunn ML, Daily JW, Rai R, Sens. Actuators A-Phys., 95, 120 (2002)

[15] Becker H, Lacascio LE, Talanta, 56, 267 (2002)

[16] Xia Y, Whitesides GM, Annu. Rev. Mater. Sci., 28, 153 (1998)

[17] Hanemann T, Ade M, Borner M, Motz G, Schulz M, Hauelt J, Adv. Eng. Mater., 4, 869 (2002)

[18] Cromme P, Scheffler M, Greil P, Adv. Eng. Mater., 4, 873 (2002)

[19] Chou SY, Krauss PR, Renstrom PJ, Appl. Phys. Lett., 67, 3114 (1995)

[20] Chou SY, Krauss PR, Renstrom PJ, J. Vac. Sci. Technol. B, 14(6), 4129 (1996)

[21] Ooe H, Morimatsu M, Yoshikawa Y, Kawata H, Hirai Y, J. Vac. Sci. Technol. B, 23(2), 375 (2005)

[22] Hirai Y, Harada S, Kikuta H, Tanaka Y, Okano M, Isaka S, Kobayasi M, J. Vac. Sci. Technol. B, 20(6), 2867 (2002)

[23] Lee JN, Park C, Whitesides GM, Anal. Chem., 75, 6544 (2003)

[24] Bhushan B, Li X, Int. Mater. Rev., 48, 125 (2003)

[25] Li XD, Bhushan B, Thin Solid Films, 340(1-2), 210 (1999)

[26] Lim X, Bhushan B, Takashima K, Baek CW, Kim YK, Ultramicroscopy, 97, 481 (2003)

[27] Dittrich PS, Tachikawa K, Manz A, Anal. Chem., 78, 3887 (2006)

[28] Asthana A, Asthana Y, Sung IK, Kim DP, Lab Chip, 9, 1200 (2006)