화학공학소재연구정보센터
홈 로그인 로그아웃 연락처 사이트맵
Journal of the Korean Industrial and Engineering Chemistry, Vol.19, No.6, 640-644, December, 2008
Export Citation
저온 플라스마 공정을 이용한 알루미늄 표면의 건식 세정에 관한 연구
A Study on the Dry Cleaning of Aluminium Surfaces by Low Temperature Plasma Process
임경택1, 김경환2, 김경석2, 이휘지2, 송선정3, 손호경4, 조동련1, 5, †
  • 1전남대학교 촉매연구소, 광소재부품연구센터
  • 2전남대학교 응용화학공학부, BK21 기능성 나노 신화학소재 사업단
  • 3전남대학교 응용화학공학부, BK21 기능성 나노 신화학소재사업단
  • 4시드니 공과대학교 환경공학부
  • 5전남대학교 응용화학공학부
Gyeong-Taek Lim1, Kyung Hwan Kim2, Kyung Seok Kim2, Hui Jie Li2, Sun Jung Song2, Hokyong Shon3, and Dong Lyun Cho1, 2, †
  • 1Research Institute for Catalysis and Center for Photonic Materials and Devices, Chonnam National University, Gwangju 500-757,Korea
  • 2School of Applied Chemical Engineering and Center for Functional Nano Fine Chemicals, Chonnam National University, Gwangju 500-757, Korea
  • 3Faculty of Engineering, University of Technology, Sydney, P.O. Box 123, Broadway, NSW 2007, Australia, Korea
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초록
저온 플라스마 공정을 이용하여 알루미늄 표면에 묻은 윤활유를 세정하였다. 아르곤이 혼합된 산소 플라스마를 사용하였으며, 아르곤의 혼합비, 방전전력, negative DC potential 등의 공정변수를 변화시키면서 실험을 수행하였다. 저온 플라스마 세정 후 케이스의 표면을 FTIR과 EDX를 사용하여 분석한 결과 순수 윤활유의 경우 대부분이 20 min 안에 제거되었다. 제거효율은 저온 플라스마 공정조건에 따라 크게 달라졌으며, 산소에 아르곤이 약 30% 혼합된 기체를 사용하여 케이스에 -500 V 이상의 negative DC potential을 걸어주고 300 W로 처리할 때 가장 높은 효율을 보였다. 하지만, 무기물이 함유된 윤활유의 경우에는 어떤 조건에서도 60% 이상의 제거효율을 얻을 수 없었다.
Lubricating oil on aluminium surfaces was cleaned by a low temperature plasma process. Oxygen plasma mixed with argon was used, and process parameters were the mixing ratio of argon in oxygen, discharge power, and negative DC potential. The aluminium surfaces were analyzed with FTIR and EDX after the cleaning. It was found that almost all of the oil was eliminated in 20 min. if the oil was pure. Elimination efficiency was highly dependent on operational conditions of the process. The highest efficiency was obtained when treated at 300 W with oxygen plasma mixed with 30% argon applying negative potential more than -500 V on the aluminium surfaces. However, efficiency higher that 60% cannot be obtained at any condition if the oil contained inorganic materials.
Keywords:low temperature plasma;elimination efficiency;discharge power;negative DC potential
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