화학공학소재연구정보센터
홈 로그인 로그아웃 연락처 사이트맵
Polymer(Korea), Vol.33, No.1, 79-83, January, 2009
Export Citation
플라즈마 중합으로 코팅된 콘덴서 케이스 전기 절연박막의 내구성에 관한 연구
A Study on the Durability of Thin Electric Insulation Layers Coated on Condenser Cases by Plasma Polymerization
김경환1, 2, 송선정1, 임경택2, 김경석1, 2, 이휘지1, 2, 김종호1, 2, 조동련1, 2, †
  • 1전남대학교 응용화학공학부, BK21 기능성나노신화학소재사업단
  • 2전남대학교 촉매연구소 광소재부품연구센터
Kyung Hwan Kim1, 2, Sun Jung Song1, Gyeong-Taek Lim2, Kyung Seok Kim1, 2, Hui Jie Li1, 2, Jong-Ho Kim1, 2, and Dong Lyun Cho1, 2, †
  • 1School of Applied Chemical Engineering and Center for Functional Nano Fine Chemicals, Chonnam National University, Gwangju 500-757, Korea
  • 2Research Institute for Catalysis and Center for Photonic Materials and Devices, Chonnam National University, Gwangju 500-757, Korea
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초록
Hexamethyldisiloxane(HMDSO)+O2를 플라즈마 중합시켜 알루미늄 판과 알루미늄 콘덴서 케이스 표면에 전기 절연박막을 코팅하였다. 코팅된 박막들은 두께가 0.5 μm 이상이면 박막의 종류에 상관없이 1.0 MΩ 이상의 저항 값을 보였으며, 박막의 표면 형태 및 접착력은 플라즈마의 공정조건에 따라 달라졌다. 박막의 증착속도 및 접착력은 O2 /HMDSO 유량비와 방전전력에 따라 달라졌으며, 유량비가 4이고 방전전력이 60 W일 때 가장 좋은결과를 보였다. 접착력은 또한 알루미늄을 끓는 물에서 30분간 전처리한 경우에 박막과 알루미늄 표면 사이에 Al-O-Si 결합을 형성하면서 크게 향상되었다. 이렇게 코팅된 박막은 우수한 내약품성과 내열성을 지니고 있었다.
Thin electric insulation layers were coated on aluminum plates and aluminum condenser cases by plasma polymerization of HMDSO+O2. Electric resistances of the films were higher than 1.0 MΩ if they are thicker than 0.5 μm independently of the type of films but their surface morphologies and adhesion strengths were dependent on the process conditions. Deposition rate and adhesion strength of the films were dependent on O2/HMDSO flow ratio and discharge power. The best result was obtained at O2 /HMDSO flow ratio of 4 and discharge power of 60 W. Adhesion strength could also be highly improved if aluminum was pre-treated in boiling water for 30 min through the formation of Al-O-Si bonding between the film and the aluminum surface. The coated films showed excellent chemical and thermal resistances.
Keywords:electric insulation layer;plasma polymerization;durability;adhesion strength;chemical and thermal resistance.
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