화학공학소재연구정보센터
Journal of Crystal Growth, Vol.309, No.2, 134-139, 2007
High-quality diamond films grown at high deposition rates using high-power-density MWPCVD method with conventional quartz-type chamber
Undoped and boron-doped homoepitaxial diamond films with high quality have been successfully grown on high-pressure/high-temperature-synthesized type-Ib single-crystalline diamond (100) substrates. In the growth process, a conventional microwave-plasma (MWP) chemical-vapor-deposition (CVD) system with an easily-exchangeable 36-mm-inner-diameter quartz-tube growth chamber was employed under a condition of high MW power densities while a rather high methane concentration (4%) and high substrate temperatures (> 1000 degrees C were used. The growth conditions applied to the undoped and B-doped diamond thin films were separately optimized by controlling the MW plasma density and substrate temperatures. The homoepitaxial films thus grown yielded strong exciton-related luminescence even at room temperature, meaning that their crystalline quality was good and roughly comparable with that of homoepitaxial films deposited using a high-power MWPCVD system with a stainless steel chamber having a rather large diameter. This indicates that by using such a conventional deposition system with inexpensive and easily-exchangeable exclusive-use quartz-tube chambers, various growth experiments can be performed under different process conditions without any severe interference among the different experiments. (C) 2007 Elsevier B.V. All rights reserved.