HfSixOyNz layers were grown on Si substrates prior to HfO2 growth in order to investigate the growth of an interfacial layer between HfO2 and Si substrate and the chemical composition changes at the interfacial region. The effects of the HfSixOyNz buffer layers were also investigated. The HfSixOyNz and HfO2 films were grown by remote plasma atomic layer deposition using N-2/O-2 plasma and O-2 plasma, respectively. The HfSixOyNz films were grown using a TDEAH precursor and N-2/O-2 mixed plasma. The Hf-N and N-O bonds of the HfSixOyNz layers were easily broken by annealing at 800 degrees C in N-2 ambient because their bonds were relatively weak. The peak intensities of the Si-O-N, Hf-O-Si, and Si-O bonds at the interfacial region increased after annealing. The excess N atoms due to the breaking of the Hf-N and N-O bonds can form bonds with Si atoms in the interfacial region and cause the growth of SiOxNy or SiNx. The excess Hf and O atoms can grow HfSixOy or SiO2 due to interactions with Si atoms. The formation of the HfSixOyNz layer can suppress the growth of Hf silicate or an interfacial layer. The formation of a thick HfSixOyNz layer enhanced the thermal stability of the interfacial layer of the HfO2 film as it had a larger amount of effective fixed oxide charges than a thin HfSixOyNz layer. (c) 2007 American Vacuum Society.