It is well known that one limitation of thermal nanoimprint lithography is the difficulty to imprint simultaneously nano- and microstructures because of the resulting different residual layer thicknesses, which induce a very poor control of the pattern sizes during the etching steps. Line gratings with densities varying from 1 to 15 have been imprinted on 8 in. wafers. The residual thickness varies from 38 to 158 nm. Different plasma chemistries have been studied for the etching of the residual layer. The patterns have been characterized after the imprint and the etching steps by scatterometry. The results show that some chemistries are very promising for the control of the patterns during the etching step. A O2/C12/Ar process has been particularly studied, and it has been demonstrated that it presents a very high anisotropy, which allows the use of long etching times in order to remove the residual layer in gratings with various densities with no variation of the critical dimension. (c) 2007 American Vacuum Society.