화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.25, No.6, 2531-2536, 2007
Hybrid semiconductor/nanoelectronic circuits: Freeing advanced lithography from the alignment accuracy burden
This is a brief review of the recent work on devices and architectures for hybrid semiconductor/nanoelectronic circuits using an area-distributed "CMOL" interface between its subsystems. Such circuits may provide unprecedented performance in several applications including memories, digital logic circuits, and bioinspired mixed-signal networks, while requiring nanoscale resolution for fabrication of just one simple pattern (a grid of parallel, similar lines) without layer alignment. Detailed calculations have shown that switching to the hybrid circuit technology may allow an extension of the Moore's law by 10 to 15 years. (C) 2007 American Vacuum Society.