화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.25, No.6, 2611-2615, 2007
Prospects for nanowire sculptured-thin-film devices
In this paper, we introduce a modified serial bideposition (SBD) method, asymmetric SBD, for depositing sculptured thin films (STFs) which may allow added control of the surface area, void accessibility, and optical properties of STFs. Results on using TiO2 STFs with spectral-hole filters as vapor/liquid sensors are presented. In addition, solar cell, microcavity, biological sensing, and bioabsorption devices utilizing STFs are discussed. (C) 2007 American Vacuum Society.