Cinnamoyl기 함유 Poly[<i>N</i>-(<i>p</i>-hydroxyphenyl)maleimide] 감광성 고분자의 합성과 감광특성

김태호; 김상민

Polymer(Korea), Vol.21, No.1, 1-6, January, 1997

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Cinnamoyl기 함유 Poly[N-(p-hydroxyphenyl)maleimide] 감광성 고분자의 합성과 감광특성

Synthesis and Properties of Poly[N-(p-hydroxyphenyl) maleimide] with Photosensitive Cinnamoyl Groups

김태호, 김상민

초록

Poly [N-(p-hydroxyphenyl)maleimide](PHPMI)를 합성하고 clnnamoyl chloride와 반응시켜 감광성 cinnamoyl 기를 측쇄에 함유한 GPHPMI를 합성하였다 광중감제인 benzophenone과 1,2-benzoanthraquinone을 농도별로 CPHPMI와 혼합하여 감광액을 제조하였다. 자외선 조사에 의한 잔막실험 결과 광중감제 농도가 1 wt% 또는 5 wt%로 증가함에 따라 잔막수율이 더욱 증가하였고 감광도도 증가하는 경향을 보였다. 또한 CPHPMI의 자외선 조사에 의한 화상형성과 해상력을 조사하였다.

Poly [N-(p-hydroxyphenyl)maleimide](PHPMI) was reacted with cinnamoyl chloride to give a photosensitive polymer CPHPMI having cinnamoyl groups in the side chains. Photosensitive CPHPMI films were prepared by mixing CPHPMI with benzophenone or 1,2-benzoanthraquinone as a photosensitizer. Photosensitive properties of CPHPMI were Investigated by measuring the yields of residual film. The residual film thickness of GPHPMI resist was further increased with increasing photosensitizer content from 1wt% to 5wt%. Negative tone images of CPHPMI resist films were obtained by UV exposure and development.

Keywords:polymaleimide;photosensitive polymer;photosensitizer;negative image;cinnamoyl groups

[References]

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[1] Akamatsu K, "New Technology for Photosensitive Resins," p. 364, CMC Press, Tokyo (1987)

[2] Rubner R, Ahne H, Kuhn E, Kolodzieji G, Photogr. Sci. Eng., 23, 303 (1979)

[3] Hurukawa J, "High Performance Aromatic Polymeric Materials," p. 287, Maruzen Co. (Japan) (1990)

[4] Inoue W, Kobunshi Kagaku, 39, 104 (1990)

[5] Japan Patent, 59-11322 (1984)

[6] Japan Patent, 59-135210 (1984)

[7] Kellou MS, Jenner G, Eur. Polym. J., 12, 883 (1976)

[8] Gaylord NG, J. Macromol. Sci.-Rev. Macromol. Chem. Phys., C13, 235 (1975)

[9] Zott H, Heusinger H, Eur. Polym. J., 14, 89 (1978)

[10] Chiang W, Lu J, J. Appl. Polym. Sci., 50, 1007 (1993)

[11] Shim JS, Kikuchi S, Kagyo Kagaku Zasshi, 68, 387 (1965)

[12] Odian G, "Principles of Polymerization,"3rd ed., p. 282, Wiley, New York (1991)