We report on the study of amorphous carbon films using the small angle X-ray scattering (SAXS) technique. The films were deposited by ion beam assisted deposition at different assisting ion energies, ranging from 50 eV to 200 eV The film density was determined by Rutherford back-scattering (RBS) and the film thickness was measured by a stylus profilometer. The film density increases as the assisting ion energy used during deposition increases. Small angle X-ray scattering results revealed large scatter centers within the matrix, increasing in size with assisting ion energy. The mean distance between those centers was found to be about 2.5 nm independent of the deposition conditions. The gyration radius (Rg) is in the 18 nm to 25 nm range, while the film is about 100 nm thick. (C) 2007 Elsevier B.V. All rights reserved.