화학공학소재연구정보센터
Thin Solid Films, Vol.516, No.5, 798-802, 2008
Synthesis of nanometal oxides and nanometals using hot-wire and thermal CVD
We report the synthesis of nano-oxides of molybdenum, tungsten, and zinc. Molybdenum oxide (MoO3) and tungsten oxide (WOx) were produced by hot-wire CVD with molybdenum and tungsten filaments, respectively while zinc oxide (ZnO) was produced by thermal CVD. When high purity molybdenum wire was oxidized at ambient system atmosphere, nanorods and nanostraws Of MoO3 with length ranging from similar to 20-80 nm and diameters ranging from similar to 5-15 irm were produced. Also, the oxidation of the tungsten filament led to the deposition of tungsten oxide nanorods (10-25 nm diameter and 75-90 nm long) and nanospheres with diameters of similar to 60 nm. Each oxide was reduced to its metallic form by annealing in a hydrogen environment to produce metallic nanoparticles. Nanorods and nanoribbons of ZnO with diameters ranging from 20-65 nm and lengths up to 2 mu m were also produced. (c) 2007 Elsevier B.V. All rights reserved.