화학공학소재연구정보센터
Thin Solid Films, Vol.516, No.7, 1401-1404, 2008
Growth of ZnO layers for transparent and flexible electronics
We have deposited and characterised ZnO on flexible and transparent plastic polymer. We employed a specially designed vapour phase growth system with elemental sources for zinc and oxygen and deposited thin ZnO films at temperatures below 400 degrees C. Basic photoluminescence characterisation confirms ZnO. Ohmic contacts were fabricated on these layers and the layers exhibit significantly high electron concentration with carrier mobility mu of up to 10.78 cm(2) V-1 s(-1). Furthermore, we show how these layers can be processed with conventional device processing techniques. (c) 2007 Elsevier B.V. All rights reserved.