화학공학소재연구정보센터
Thin Solid Films, Vol.516, No.8, 2195-2202, 2008
High-permittivity and low-loss dielectric tunable pyrochlore thin films deposited by radio frequency magnetron sputtering from a lead zinc niobate target
Since Bi2O3-ZnO-Nb2O5 (BZN) pyrochlore thin films have been introduced as a tunable dielectric, the substitution of Bi with Pb could be a reasonable choice. The PbO-ZnO-Nb2O5 (PZN) cubic pyrochlore thin films were produced by radio frequency sputtering, and their dielectric properties, in terms of tunability, were measured. Up to 33.4% of tunability and comparable K factors with BZN films were obtained. The effects of film crystallization, along with substrate heating and post-annealing on the dielectric properties, were similar to those of BZN. However, strong texturing developed in the PbO-ZnO-Nb2O5 (PZN) films deposited at a high substrate temperature, which caused degradation of the loss tangent and K factor. (C) 2007 Published by Elsevier B.V.