Thin Solid Films, Vol.516, No.10, 3374-3377, 2008
Studies of ion irradiation effects in hydrogenated amorphous carbon thin films by X-ray absorption and photoemission spectroscopy
C K-edge X-ray absorption near-edge structure (XANES) and valence-band photoemission spectroscopy (PES) measurements were taken for hydrogenated amorphous carbon films before and after ion beam irradiation. The C K-edge XANES and valence-band PES spectra indicate that irradiation breaks C-C bonds to form C=C bonds and has a similar effect on the electronic structures of the films, irrespective of the hydrogen content. The valence-band PES measurements reveal that ion beam irradiation markedly enhances the density of carbon pi states in the vicinity of the Fermi level. (c) 2007 Elsevier B.V. All rights reserved.
Keywords:diamond like carbon;thin films;X-ray absorption near-edge structure;valence-band photoelectron spectroscopy