Solid-State Electronics, Vol.51, No.11-12, 1596-1608, 2007
One and two port piezoelectric higher order contour-mode MEMS resonators for mechanical signal processing
This paper reports on the design, fabrication and testing of novel one and two port piezoelectric higher order contour-mode MEMS resonators that can be employed in RF wireless communications as frequency reference elements or arranged in arrays to form banks of multi-frequency filters. The paper offers a comparison of one and two port resonant devices exhibiting frequencies approximately ranging from 200 to 800 MHz, quality factor of few thousands (1000-2500) and motional resistances ranging from 25 to 1000 Omega. Fundamental advantages and limitations of each solution are discussed. The reported experimental results focus on the response of a higher order one port resonator under different environmental conditions and a new class of two port contour resonators for narrow band filtering applications. Furthermore, an overview of novel frequency synthesis schemes that can be enabled by these contour-mode resonators is briefly presented. (c) 2007 Elsevier Ltd. All rights reserved.