화학공학소재연구정보센터
Applied Surface Science, Vol.254, No.7, 2110-2113, 2008
The effect of contamination of dielectric target surfaces under electron irradiation
The influence of the contamination film formed under the electron bombardment of the sample surface on the conditions of experimental studies using analytical electron-probe apparatus (scanning electron microscopes, X-ray microanalyzers) is considered. The accompanying artifacts, namely the decreased effective value of the secondary electron emission coefficient and the shifted value of the second crossover energy of primary electrons are calculated. (C) 2007 Elsevier B.V. All rights reserved.