Electron-induced chemical lithography combined with self-assembled monolayers and multivalent chelators for high-affinity capturing of His-tagged proteins are used to obtain specific, stable, highly parallel, and functional protein micro- and nanoarrays on solid substrates. ne functionality of the generated large-area protein arrays is shown in situ via specific, homogeneous, oriented and reversible immobilization of His(6)-tagged 20S proteasome and fluorescence labelled His(10)-tagged maltose binding proteins.