화학공학소재연구정보센터
Advanced Materials, Vol.21, No.19, 1921-1926, 2009
Hierarchically Ordered Topographic Patterns via Plasmonic Mask Photolithography
By employing a block copolymer to spatially organize silver nanoparticles, laser light can be concentrated via plasmon resonance to locally expose a photoresist. By subsequent development, this plasmonic lithography can provide deep subwavelength scale features.