Micro/nanotechnology is initiated from the electronics industry. In recent years, it has been extended to micro/nanoelectromechanic system for producing miniature devices based on silicon and semiconductor materials. However, the use of these hard materials alone is inappropriate for many biomedical devices. Soft polymeric materials possess many attractive properties such as high toughness and recyclability. Some possess excellent biocompatibility, are biodegradable, and can provide various biofunctionalities. Proper combinations of micro/nanoelectronics, polymers, and biomolecules can lead to new and affordable medical devices. In this paper, we briefly review several cleanroom and noncleanroom techniques related to micro/nanomanufacturing of polymeric materials. (C) 2009 Wiley Periodicals, Inc. Adv Polym Techn 27: 188-198, 2008; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/adv.20134