The highly ordered TiO2 thin films are prepared by anodic oxidation and calcined at 300, 400, 500 and 600 degrees C, respectively. X-ray diffraction (XRD) and field emission scanning electron microscopy (FESEM) are employed to analyze the structure and the morphology of the TiO2 films. We design a novel sensor to investigate the humidity sensing behaviours of the samples. The samples calcined at 600 degrees C show high sensitivity with nearly two orders change in the resistance and short response and recovery time (< 190 s) during the relative humidity variation from 11 to 95%. (C) 2008 Elsevier B.V. All rights reserved.