Applied Surface Science, Vol.255, No.4, 897-900, 2008
Combined simulations and analytical model for predicting trends in cluster bombardment
A series of computational investigations has been performed to examine the mesoscale energy dynamics of cluster bombardment events on a variety of systems. Through the development and application of the mesoscale energy deposition footprint (MEDF) model, we have successfully predicted the yield trends exhibited by a variety of projectiles and incident energies. The details of this model, dynamics of the damaged region, and comparison to experimental SIMS results are presented. The general cluster behavior which is revealed by this study is also discussed. (C) 2008 Elsevier B. V. All rights reserved.