Applied Surface Science, Vol.255, No.4, 1055-1057, 2008
The effect of C-60 cluster ion beam bombardment in sputter depth profiling of organic-inorganic hybrid multiple thin films
The effects of C-60 cluster ion beam bombardment in sputter depth pro. ling of inorganic-organic hybrid multiple nm thin films were studied. The dependence of SIMS depth profiles on sputter ion species such as 500 eV Cs+, 10 keV C-60(+), 20 keV C-60(2+) and 30 keV C-60(3+) was investigated to study the effect of cluster ion bombardment on depth resolution, sputtering yield, damage accumulation, and sampling depth. (C) 2008 Elsevier B. V. All rights reserved.