SIMS depth pro. ling analysis of Au(Cu)/CdTe/CdS/SnO2 solar cell structures were done. We analyzed these structures in the so-called CsM+ mode and found an extremely high yield of Cs(2)Hn(+) cluster ions, where Hn is halogen, in comparison with CsHn(+) ion yield and in comparison with yields of other Cs2M+ clusters, where M is another metal or non-metal element. There was no any interference for Cs(2)Hn(+) cluster ions (for F and Cl) with other clusters in the concentration range of interest. This makes it possible to perform analysis of all elements of interest in noticed solar cells (halogens, metals and non-metals) during only one SIMS analysis. Possible explanation of the found anomalous yield is discussed. (C) 2008 Elsevier B. V. All rights reserved.