화학공학소재연구정보센터
Applied Surface Science, Vol.255, No.5, 1870-1873, 2008
The properties of La0.7Sr0.3MnO3 films prepared by dc magnetron sputtering using nanosized powder compacted target: Effect of substrate temperature
La0.7Sr0.3MnO3 (LSMO) thin. films have been deposited on Si(1 0 0) substrates at different substrate temperatures in a mixed argon and oxygen atmosphere by dc sputtering using LSMO targets prepared from nanosized powder. The influence of the deposition temperature on the structural, magnetic and transport properties of LSMO. films were studied. The results show that in our experimental conditions, the LSMO thin. films deposited at 650 degrees C have the best crystalline quality. Magnetic and magnetotransport studies show the highest Curie temperature (T-c) of 300 K and metal insulator transition temperature (T-MI) of 250 K at room temperature. (C) 2008 Elsevier B. V. All rights reserved.