Nano-structured carbon films (NCFs) were grown on Mo layers by microwave plasma chemical vapor deposition (MPCVD) system. The Mo layers were deposited on ceramic substrates by electron beam deposition method and were pretreated by different techniques, which include ultrasonically scratching and laser-grooving technology (10 line/mm). NCFs were characterized by a field emission type scanning electron microscope (FE-SEM), Raman spectra and field emission (FE) I-V measurements. Effects of process parameters on morphologies, structures and FE properties of NCFs were examined. The experimental results show that two kinds of NCFs deposited at the same parameters employed for the MPCVD process were respectively composed of carbon nano-balls and reticular carbon nano-tubes inlayed by carbon nano-balls with dissimilar disorder structures, both NCFs showed each merits and exhibited good field emission properties, especially shown in the uniformity of FE, the uniform field emission images with areas of 4 cm(2) were obtained. Growth mechanism influenced by different pretreated method was discussed and the possible FE mechanisms of the NCFs were also investigated. Finally, the process characteristics of laser-grooving technology were analyzed, and its potential applications were predicted. (C) 2008 Elsevier B.V. All rights reserved.