Chemical-and heat treatment was performed to modify the surface of the microarc oxidized TiO2-based (TOB) film containing P to produce nano-scale compounds containing Na, Ti and O elements. In the TOB film, anatase and rutile nanocrystals were randomly distributed in P-doped matrix. On the surface of the chemically treated TOB (C-TOB) film, amorphous titanium oxide containing Na shows nano-scale ribbonlike morphology. Na, Ti and O show uniform distribution in the outer layer of the C-TOB film along surface depth. Chemical treatment did not alter the surface roughness of the TOB film obviously; however, it improved its hydrophilic property. Heat treatment has no influence on the chemical states of Ti, Na and O, as well as wetting ability, elemental composition and atomic concentration in the outer layer of the C-TOB film. However, the phase compositions and surface morphology of the C-TOB film after heat treatment are dependent on the heat treatment temperature. (C) 2009 Elsevier B. V. All rights reserved.