Three-dimensional modeling of particle impacting behavior in cold spraying by using ABAQUS/Explicit was conducted for copper and other materials. Various combinations of calculation settings concerning material damage, Arbitrary Lagrangian Eulerian adaptive meshing, distortion control and contact interaction were examined. The effects of meshing size and particle size on the impact behavior were analyzed compared to the previous results. The results show that the simulations with material damage cope well with the element excessive distortion and the resultant output is more reasonable than that obtained without material damage. In addition, the meshing size has less effect on the output with the material damage than without material damage. Although particle size has little effect on the morphologies of the deformed particles, it has some effect on the failure of elements at contact interfaces. The critical velocity for particle deposition could be estimated given the appropriate material properties. (C) 2009 Elsevier B. V. All rights reserved.