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Electrochemical and Solid State Letters, Vol.12, No.1, H21-H25, 2009
Organic Oxidants for Chemical Mechanical Planarization
Reaction of iodine with carbon acids with a pK(a) below 13 leads to iodine-containing molecules that are effective oxidants for copper while being stable and having a high solubility. The identities of these compounds and other reaction products is elucidated by the use of liquid chromatography-mass spectrometry and UV/visible analysis. The mechanism of polishing copper with slurries containing these oxidants is examined by electrochemical experiments and shown to be similar to the oxidation of copper with iodine where a CuI film forms a weakly passivating film by dissolution and precipitation and is removed mechanically.
Keywords:chemical mechanical polishing;chromatography;copper;dissolving;electrochemistry;mass spectroscopic chemical analysis;oxidation;passivation;planarisation;precipitation (physical chemistry);solubility;ultraviolet spectra;visible spectra