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Electrochemical and Solid State Letters, Vol.12, No.6, H229-H232, 2009
Illumination-Assisted Negative Bias Temperature Instability Degradation in Low Temperature Polycrystalline Silicon Thin-Film Transistors
In this work, the negative bias temperature instability (NBTI) in low temperature polycrystalline silicon thin-film transistors in a darkened and in an illuminated environment was investigated. Experimental results reveal that the generation of interface state density (N-it) showed no change between the different NBTI stresses. Nevertheless, the degradation of the grain boundary trap (N-trap) under illumination was more significant than that in the darkened environment. This phenomenon is mainly caused by the extra number of holes generated during the illuminated NBTI stress.
Keywords:elemental semiconductors;grain boundaries;insulated gate field effect transistors;interface states;semiconductor device reliability;silicon;thin film transistors