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Electrochemical and Solid State Letters, Vol.12, No.7, G31-G33, 2009
Resistance Switching Characteristics of TiO2 Thin Films Prepared with Reactive Sputtering
In this work, reactively sputtered TiO2 films were reported to contain reduced Ti ions, the concentration of which correlates to the conductive channels formed in the film through percolation. Cells made on these films appear with different switching behaviors, depending on whether the as-fabricated cell intercepts the conductive channels. Films with a high population of conductive channels are "forming free" because most of the devices fabricated on them may intercept conductive channels and initially appear in the low resistance state.
Keywords:electrical conductivity;electrical resistivity;percolation;semiconductor materials;semiconductor thin films;sputter deposition;titanium compounds