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Electrochemical and Solid State Letters, Vol.12, No.9, H322-H324, 2009
Fabrication of High Performance GaN-Based Vertical Light-Emitting Diodes Using a Transparent Conducting Indium Tin Oxide Channel Layer
We fabricate blue GaN-based vertical light-emitting diodes (LEDs) using transparent insulating SiO2 and conducting indium tin oxide (ITO) channel layers connected to the passivation layer by a combined process of electroplated deposition and a laser lift-off technique. It is shown that unlike the SiO2 layer, the ITO layer effectively serves as current spreading and injection layers. LEDs fabricated with the ITO channel layer exhibit a slightly higher reverse current when the voltage exceeds -10 V. However, LEDs fabricated with the ITO layer produce higher output power (by similar to 20% at 100 mA) compared to LEDs with the SiO2 layers.