An electrodeposition method has been used to prepare thin CuS films on nickel- or gold-coated silicon substrates. The effects of current density, deposition time, solution stirring, and addition of polymer additives have been studied to determine the optimum conditions for CuS formation. Semi-three-dimensional concentric microbatteries (3DCMBs) on perforated silicon substrates showed a superior peak-power capability of 50 mW/cm(2) and a stable electrochemical behavior. The reversible capacity of the semi-3DCMBs is 1.0-2.5 mAh/cm(2) of battery footprint, which agreed with the geometrical-area gain. It is expected that the full 3DCMB may exhibit even better energy density and power capability of 7.4 kW/L. (C) 2009 The Electrochemical Society. [DOI: 10.1149/1.3240921] All rights reserved.