BiFeO3 (BFO) thin films were deposited on SrRuO3(SRO)/yttria-stabilized zirconia (YSZ)/glass substrates by pulsed laser deposition. To grow highly a- and (110)-oriented SRO bottom electrodes, we used YSZ buffer layers between SRO bottom electrodes and glass substrates. On the highly a- and (110)-oriented SRO bottom electrodes, we obtained highly c- and (011)-oriented BFO thin films in which the structures of BFO thin films were confirmed by X-ray diffraction experiments. The highly c-oriented BFO thin film exhibited a higher ferroelectric polarization (about 40 mu C/cm(2)) than the highly (011)-oriented BFO thin film. The highly c- oriented BFO thin film also showed a ferromagnetic hysteresis loop while the highly (011)-oriented BFO thin film exhibited a superparamagnetic hysteresis loop. (C) 2009 The Electrochemical Society. [DOI: 10.1149/1.3250437] All rights reserved.