화학공학소재연구정보센터
Journal of Crystal Growth, Vol.311, No.7, 1881-1884, 2009
Performance of gas source MBE-grown wavelength-extended InGaAs photodetectors with different buffer structures
Wavelength-extended InyGa1-yAs photodiodes with cut-off wavelengths of 2.0, 2.4 and 2.7 mu m at room temperature were grown using gas source molecular beam epitaxy with linearly graded InxAl1-xAs (x=0.52 to y) buffer layers and InyAl1-yAs cap layers. A convenient and reliable correlating ramping procedure was developed for the growth. Detector performances were compared with our standard homojunction detectors containing linearly graded InxGa1-xAs buffer layers. The heterojunction detectors showed better performance than the homojunction detectors. Also, the use of wider bandgap buffer and cap made the heterojunction detectors more suitable for both front and back illumination. For the photodiodes with 500 mu m mesa diameter at room temperature, the typical dark current (V-R=10 mV) and ROA were 74nA and 104 Omega cm(2) at 290 K for the cut-off wavelength of 2.4 mu m. Optimization of the buffer structure was necessary for further extension of the response wavelength. (C) 2008 Elsevier B.V. All rights reserved.