화학공학소재연구정보센터
Journal of Crystal Growth, Vol.311, No.17, 4281-4288, 2009
Influence of crucible geometry and position on the induction heating process in crystal growth systems
A series of 2D finite element numerical simulations of induction heating process for an oxide Czochralski crystal growth system has been done for different shapes and locations of a metal crucible. Comparison between the computational results shows the importance of crucible shape, geometry and its position with respect to the RF-coil on the electromagnetic field and heat generation distribution in the growth setup. (C) 2009 Elsevier B.V. All rights reserved.