Vertically well-aligned ZnO nanorods were fabricated in-situ and ex-situ on ZnO homo-buffer layers using catalyst-free metal-organic chemical vapor deposition. Field-emission electron microscopy measurements demonstrated that the nanorods were well aligned and had a uniform diameter of 70-100 nm depending on the growth temperature, irrespective of growth conditions, in-situ and ex-situ. X-ray diffraction measurements demonstrated that the ZnO nanorods and the ZnO buffer layers had a wurtzite structure, and that the crystal quality of the nanorods grown on a smooth surface was better than that of the nanorods grown on a rough surface. Field-emission transmission electron microscopy measurements revealed the presence of a disordered layer at the interface of the nanorod and the buffer layer. (C) 2009 Elsevier B.V. All rights reserved.