The application of mesoporous silica and silica-titania-mixed metal oxide films prepared via sol-gel processing as substrates for cell growth was investigated. A deliberate tailoring of the chemical composition of the porous substrates with different Si:Ti ratios was achieved by using a single-source precursor based on a titanium-coordinated alkoxysilane, resulting in mesoporous silica-titania films with hydrophilic surfaces. The different coatings were investigated with respect to their applicability in the cultivation of human cells such as human fibroblasts and multipotent mesenchymal stromal cells. It was found that they promoted cell adhesion and proliferation of human fibroblasts up to a period of 14 days. After 2 weeks only single apoptotic cells could be detected on silica-titania mixed oxide films in contrast to a somewhat higher amount on silica coatings. Furthermore, none of the films inhibited osteogenic differentiation of multipotent mesenchymal stromal cells.