Dissipative particle dynamics simulations are applied to investigate the monolayer and multilayer film formations on different solid substrates by physical deposition. The influences of the polymer concentration, the polymer chain length, the solvent quality, and the interactions between the polymer solution and the solid substrate surface on the film formation dynamics and the mechanism are studied in detail. The results are analyzed in terms of the thickness and the shape of the deposited film, the kinetics of phase separation in the polymer solution, and the contact angle formed between the polymer aggregations and the substrate surface. Moreover, we suggest two strategies, designing a deposition process analogous to "chemical titration" and physically blocking interlayer diffusion by a simple crosslinked network barrier, to deposit the compact monolayer and multilayer films with better quality, respectively. (C) 2009 Wiley Periodicals, Inc. J Polym Sci Part B: Polym Phys 47: 353-365, 2009