Journal of Vacuum Science & Technology A, Vol.27, No.4, 614-619, 2009
Fabrication of surface plasmon waveguides on thin CYTOP membranes
The fabrication of a membrane supported long-range surface plasmon polariton waveguide for use as a biosensor is described. This type of device can be completely immersed in the sensing environments to create symmetrical waveguide surroundings. The membrane is created from the fluoropolymer CYTOP which has strong physical properties and a low index of refraction. The fabrication steps of this device are described along with examples of completed structures.
Keywords:membranes;optical fabrication;optical polymers;optical waveguides;polaritons;refractive index;surface plasmon resonance