Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.26, No.5, 1821-1823, 2008 DOI10.1116/1.2966431 Export Citation Electron-beam lithography of multiple-layer submicrometer periodic arrays on a barium fluoride substrate Tharp JS, Shelton DJ, Wadsworth SL, Boreman GD Please enable JavaScript to view the comments powered by Disqus.
