화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.26, No.6, 2139-2144, 2008
Light modulation with nanopatterned diffractive microelectromechanical system pixels
The design, fabrication, and testing of a microelectromechanical system (MEMS) optical modulator is presented. Polarization effects of noncircular holes on reflectivity are examined. Thermal nanoimprint lithography is used to form an array of 150 nm diameter nanoholes in a 60 nm thick metal film on a silicon-on-insulator wafer. A quartz superstrate with an indium tin oxide electrode and a photoresist spacer is used to electrostatically actuate the MEMS pixel. The motion of the pixel in relation to the superstrate causes shifts in the wavelengths of optical interference from the periodic nanohole array. An optical modulation depth of over 67% is demonstrated with this modulation method. Dynamic modal analysis is also presented.