In a hot embossing process, optimization of the demolding temperature is quite important to achieve high throughput because the cooling step before demolding takes a relatively long time in the process cycle. The authors experimentally examined the influence of demolding temperature on polymer deformation. Polymer deformation was also examined using a finite element simulation tool which assumed the polymer as a viscoelastic body represented by the generalized Maxwell model. In both experiments and numerical simulations, demolding at higher temperature resulted in smaller deformation. Numerical simulations revealed that recovery of polymer deformation occurred in the cooling step after demolding at temperatures higher than the glass transition temperature of polymer. In addition, numerical simulation enables detailed analysis of the impacts of various parameters on the recovery phenomena. This numerical simulation method is expected to be a powerful tool for optimization of the hot embossing process cycle.