Journal of Vacuum Science & Technology B, Vol.27, No.3, 1207-1210, 2009
3 omega thermal conductivity measurements of thin film dielectrics on silicon for use in cantilever-based IR imaging
Jones CDW,
Pardo F,
Pai CS,
Bower JE,
Miner JF,
Klemens FP,
Cirelli RA,
Ferry EJ,
Taylor JA,
Baker MR,
Dennis BS,
Mansfield WM,
Kornblit A,
Keller RC,
Gates JV,
Ramirez AP
