Journal of Vacuum Science & Technology B, Vol.27, No.4, 1897-1900, 2009
p-type behavior of nitrogen doped, lithium doped, and nitrogen-lithium codoped Zn0.11Mg0.89O thin films
N-doped, Li-doped, and Li-N doped Zn0.89Mg0.11O thin films have been prepared by pulsed laser deposition. Hall-effect measurements indicate that the doping technique plays an important role in the p-type behavior of ZnMgO. Li doping produces high-resistivity p-type ZnMgO films, whereas N doping produces ZnMgO films with indeterminate carrier type. In contrast, Li-N codoping results in low resistivity and stable p-type ZnMgO films. The enhancement by Li and N coincorporation is investigated by secondary ion mass spectroscopy and is possibly responsible for the good p-type conduction in Li-N dual-acceptor doped Zn0.89Mg0.11O.
Keywords:electrical resistivity;Hall effect;II-VI semiconductors;pulsed laser deposition;secondary ion mass spectra;semiconductor doping;semiconductor thin films;wide band gap semiconductors;zinc compounds