Journal of Vacuum Science & Technology B, Vol.27, No.4, 1958-1962, 2009
Micropatterning of polymeric semiconductor by selective lift-off method using epoxy mold
A simple and efficient method for patterning polymeric semiconductors for applications in the field of organic electronics is proposed. The entire polymer layer, except for the desired pattern, is selectively lifted off from a flat poly(dimethylsiloxane) (PDMS) stamp surface by an epoxy mold with a relief pattern. This is advantageous because the elastic deformation of the PDMS stamp around protrusions of a patterned stamp under pressure can assist the plastic deformation of a polymer film along the pattern edges, yielding large area and high quality patterns, and the PDMS surface has low surface energy, which allows the easy removal of the polymer film.
Keywords:elastic deformation;organic semiconductors;plastic deformation;polymer films;surface energy