Journal of Vacuum Science & Technology B, Vol.27, No.6, 2745-2749, 2009
Laser print patterning of planar spiral inductors and interdigitated capacitors
This article describes direct laser printing of thin-film polymer onto rigid substrates for use as an etch mask or liftoff layer in patterning on-chip electrical components. Using this technique, the authors fabricated planar spiral inductors of 12x12 mm(2) with 2.5-5.5 turns producing series inductance L-s=80-180 nH as well as planar interdigitated capacitors of 10x10 mm(2) with two to nine fingers producing series capacitance C-s=100-1600 nF. This technique is a low cost, low temperature, rapid turn around, maskless, resist-free means of patterning device features as small as 130 mu m.
Keywords:capacitance;capacitors;etching;inductance;inductors;laser materials processing;masks;micromechanical devices;polymer films