화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.28, No.1, 62-65, 2010
Metastable structure and magnetism of Cr-doped AlN in AlN/TiN multilayers
[Cr:AlN/TiN] multilayers are prepared with various wavelengths and thicknesses of the single layers. Microstructure studies indicate that the structure of Cr:AlN is a rocksalt structure for the sample of [Cr:AlN(1.8 nm)/TiN(6.4 nm)](100). This sample is ferromagnetic in room temperature with a saturated magnetization of 2.88 emu/cm(3) and remanence of 25%. These values are higher than other [Cr:AlN/TiN] multilayers with large modulation wavelengths in which the Cr:AlN is a wurzite structure. The possible origin of magnetic variation is discussed for the authors' samples.