- Previous Article
- Next Article
- Table of Contents
Journal of Vacuum Science & Technology B, Vol.28, No.2, L9-L12, 2010
Observation of visible cathodoluminescence from Nd- and Dy-ion-implanted Si
Keywords:annealing;cathodoluminescence;dysprosium;elemental semiconductors;ion implantation;neodymium;oxidation;silicon